Title: 微影成像技術應用於硬碟表面成紋之磨潤學探討
A Tribological Study of Hard Disk Surface Textured by Microlithographic Technique
Authors: 梁弘慧
Liang Hung-Huei
馮明憲
Feng Ming-Shiann
材料科學與工程學系
Keywords: 成紋;磨潤學;Texture;Tribology
Issue Date: 1992
Abstract: 研究一新的可控制性成紋技術用以降低磁頭與硬碟之間的摩擦,以微影成
像及蝕刻技術在硬碟表上製造不同的圖案,應用 AlMg/NiP為基板,待光
罩上圖案轉移到基板後, 連續濺鍍薄膜完成硬碟製造。表面形貌以 NOP
及 OM 來觀察,磨潤特性用 CSS 及 Drag Testing來分析,研究其不同的
接觸點尺寸及距離對摩擦及磨耗的影響。我們發現摩擦係數與其接觸面積
沒有關係,但與硬碟表面接觸高度有關。
A new controllable texturing technique was employed to reduce
the friction between magnetic head and disc. Discs with
various patterns, delineated by microlithographic and etching
techniques, were investigated. AlMg/NiP substrate has been
used. After the mask patten had been transferred to
substrate, various metal films and overcoating layer were
continuously sputtered. Surface topography was investigated by
NOP ( Noncontact Optical Profiler) and OM(Optical Microscopy).
Tribological properties were analyzed by CSS(Contact Star/Stop)
and drag testing techniques. Different contact point sizes
and the corresponding spaces were used to study their
effects on the properties of friction and wearing. The
results indicate that friction coefficient is independent on
the contactarea but the surface height.
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT810159029
http://hdl.handle.net/11536/56700
Appears in Collections:Thesis