Title: 熱導型高氣壓微感測元件之研究
Study on High Pressure Microsensor of Thermal Conductivity Type
Authors: 謝正雄
國立交通大學光電工程研究所
Keywords: 微感測器;微加工技術;氣體壓力感測;熱導率;Microsensor;Micromachining;Gas pressure sensing;Thermal conductivity
Issue Date: 1996
Gov't Doc #: NSC85-2215-E009-040
URI: http://hdl.handle.net/11536/96031
https://www.grb.gov.tw/search/planDetail?id=234551&docId=43050
Appears in Collections:Research Plans