| Title: | 熱導型高氣壓微感測元件之研究 Study on High Pressure Microsensor of Thermal Conductivity Type |
| Authors: | 謝正雄 國立交通大學光電工程研究所 |
| Keywords: | 微感測器;微加工技術;氣體壓力感測;熱導率;Microsensor;Micromachining;Gas pressure sensing;Thermal conductivity |
| Issue Date: | 1996 |
| Gov't Doc #: | NSC85-2215-E009-040 |
| URI: | http://hdl.handle.net/11536/96031 https://www.grb.gov.tw/search/planDetail?id=234551&docId=43050 |
| Appears in Collections: | Research Plans |
- A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling / Chou, BCS;Chen, YM;OuYang, M;Shie, JS
- Parameter extraction of resistive thermal microsensors by AC electrical method / Ou-Yang, M;Sheen, CS;Shie, JS
- An innovative Pirani pressure sensor / Chou, BCS;Shie, JS
- Fabrication of low-stress dielectric thin-film for microsensor applications / Chou, BCS;Shie, JS;Chen, CN
- 熱型微感測元件之熱參數測量 / 黃上達;Thunter Hwang;謝正雄;Jin-Shown Shie
- Electrical characteristics of CO2-sensitive diode based on WO3 and IrO2 for microsensor applications / Chao, SC
- A highly sensitive CMOS compatible thermal-type microsensor / Sheen, CS;Chen, CN
- 室溫紅外線偵檢器與圓形極化天線在無線微感測器應用上的設計,製作與模擬分析 / 林稔杰;Ren-Jie Lin;張國明;鄧一中;Kow-Ming Chang
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