Browsing by Author Ay, CY
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| Issue Date | Title | Author(s) |
|---|---|---|
| 1-Sep-2003 | Mechanisms of circular defects for shallow trench isolation oxide deposition | Lan, JK; Wang, YL; Liu, CP; Chao, CG; Ay, CY; Liu, CW; Cheng, YL; 材料科學與工程學系; Department of Materials Science and Engineering |