Browsing by Author Fan, KM
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 1-Apr-2005 | Effects of post CF(4) plasma treatment on the HfO(2) thin film | Lai, CS; Wu, WC; Fan, KM; Wang, JC; Lin, SJ; 物理研究所; Institute of Physics |
| Issue Date | Title | Author(s) |
|---|---|---|
| 1-Apr-2005 | Effects of post CF(4) plasma treatment on the HfO(2) thin film | Lai, CS; Wu, WC; Fan, KM; Wang, JC; Lin, SJ; 物理研究所; Institute of Physics |