標題: | CAPACITOR DEVICE AND METHOD FOR FORMING THE SAME |
作者: | Chin Albert |
公開日期: | 10-五月-2012 |
摘要: | The present invention related to a method for forming a capacitor device, comprising steps of: providing a substrate, forming a first metal layer on the substrate, forming a dielectric on the first metal layer, applying a laser-annealing to the dielectric, and forming a second metal layer on the dielectric. |
官方說明文件#: | H01G004/06 B23K026/00 |
URI: | http://hdl.handle.net/11536/105185 |
專利國: | USA |
專利號碼: | 20120113561 |
顯示於類別: | 專利資料 |