利用金屬黏合及劈裂技術完成氮化鎵雷射二極體共振腔

Abstract

利用金屬黏合及雷射剝離系統等製程的整合，將長於藍寶石基板的雷射結構轉移至砷化鎵或矽基板，藉由其立方晶格之基板特性，便於將雷射結構劈裂，形成雷射共振腔之劈裂鏡面。由於金屬黏合的品質會影響劈裂時的結果，故利用金屬，以及實驗黏合時調變其黏合參數之設定，以得到較佳的效果。 經由掃描式電子顯微鏡及原子力顯微鏡之量測數據，證明我們藉由數站製程之整合流程所得到之劈裂面, 其粗糙程度是小到足以作為雷射之共振腔之鏡面。

We integrated the metal bonding and laser lift off process, then transferred the GaN LD structure to the new substrate.By the new cubic substrate, we can cleave the LD structure into a rectangle easier. It is usful to get the mirror facet of laser diode. After we measue by AFM, the data of cleaved facet roughness is qualified to be a reflectivty mirror of lase diode.