以ICP-RIE配合複合奈米強化微電鑄之LIGA法製作高寬深比合金模仁之微結構與機械性質

標題:	以ICP-RIE配合複合奈米強化微電鑄之LIGA法製作高寬深比合金模仁之微結構與機械性質 The Microstructure and Mechanical Property of High Aspect Ratio Mold Insert by LIGA Method of ICP-RIE with Nano-Strengthened Composite Microelectroplating
作者:	涂肇嘉交通大學材料科學與工程系
公開日期:	2002
官方說明文件#:	NSC91-2216-E009-020
URI:	http://hdl.handle.net/11536/93060 https://www.grb.gov.tw/search/planDetail?id=785491&docId=151051
Appears in Collections:	Research Plans

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