熱動式撓性微型機構的設計與製作(II)

標題:	熱動式撓性微型機構的設計與製作(II) Design and Fabrication of Thermal-Driven Compliant Micromechanisms (II)
作者:	徐文祥 HSU WENSYANG 交通大學機械工程系
關鍵字:	微機電系統;微致動器;表面細微加工;體微加工;微型夾子;Micro electromechanical system;Microactuator;Surface micromachining;Bulk micromachining;Microgripper;MEMS
公開日期:	1998
官方說明文件#:	NSC87-2218-E009-015
URI:	http://hdl.handle.net/11536/94862 https://www.grb.gov.tw/search/planDetail?id=395592&docId=69862
Appears in Collections:	Research Plans

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