Stacked pulse-electroplated CoNiMnP-AAO nanocomposite permanent magnets for MEMS

Abstract

The paper presents a CMOS compatible pulse-electroplating technique combined with a low temperature bonding process for the synthesis of CoNiMnP-AAO (anodic alumina oxide) nanocomposite films and the fabrication of stacked composite permanent magnets (PMs). The magnetic nanocomposite film exhibits the best characteristics of the coercivity of 2472 Oe, remanence of 4000 G, and (BH)(max) of 16.13 kJ m(-3), in the existing CoNiMnP systems. Meanwhile, a surface magnetic flux density of 9.2 mT generated by a 15-layer-stacked composite PM with a volume of 9 mm(3) has shown the potential for various magnetic microelectromechanical systems (MEMS) fabrication using the nanocomposite material.