8吋矽晶半導體LPCVD製程設備之研發---總計畫(III)

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882218E009001.pdf (661.08 KB)

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LPCVD反應爐, 薄膜成長, 熱流設計, LPCVD reactor, Thin film growth, Thermal fluid design

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https://www.grb.gov.tw/search/planDetail?id=431210&docId=77294
https://ir.lib.nycu.edu.tw/handle/11536/94464

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研究計畫;;Research Plans