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超低介電碳氮化矽薄膜之研究
超低介電碳氮化矽薄膜之研究
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Date
2015
Authors
呂志鵬
Leu Jihperng
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https://www.grb.gov.tw/search/planDetail?id=11265363&docId=453651
https://ir.lib.nycu.edu.tw/handle/11536/130507
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