Photo-leakage-current characteristic of F incorporated hydrogenated amorphous silicon thin film transistor

Abstract

The photo-leakage-current (I-PLC) characteristic of F incorporated a-Si:H thin film transistor (TFT) has been studied. The device activation energy (E-a) of a-Si:H(:F) TFTs is higher than those of typical a-Si:H TFTs, and resulted in the shift down of Fermi level in a-Si:H(:F). Experimental results show that the I-PLC of a-Si:H(:F) TFTs is smaller than that of conventional a-Si:H TFTs in the density of states limited region, stemmed from the higher recombination centers present in a-Si:H(:F) material. However, the higher I-PLC is observed in the hole conduction region, resulted from the larger E-a in the a-Si:H(:F) TFTs. (C) 2007 American Institute of Physics.