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壓電阻應力計之製程研究
壓電阻應力計之製程研究
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Date
2000
Authors
陸續
LU SU
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Abstract
Description
Keywords
壓電阻應力感測器
,
製程
,
Piezoresistive stress sensor
,
Process
Citation
URI
https://www.grb.gov.tw/search/planDetail?id=543009&docId=99834
https://ir.lib.nycu.edu.tw/handle/11536/93879
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