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學術出版;;Publications
期刊論文;;Articles
SI EPITAXIAL QUALITY IMPROVEMENT BY POST-EPI POLY-SI GETTERING
SI EPITAXIAL QUALITY IMPROVEMENT BY POST-EPI POLY-SI GETTERING
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Date
1981
Authors
CHEN, MC
SILVESTRI, VJ
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https://ir.lib.nycu.edu.tw/handle/11536/5033
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