12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---總計畫(Ⅱ)

Date

Authors

Keywords

矽晶圓, 介電薄膜, 半導體工業, 化學氣相沉積製程設備, Silicon wafer, Dielectric thin film, Semiconductor industry, Chemical vapor deposition process equipment

URI

https://www.grb.gov.tw/search/planDetail?id=662726&docId=125583
https://ir.lib.nycu.edu.tw/handle/11536/93515

Collections

研究計畫;;Research Plans