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學術出版;;Publications
期刊論文;;Articles
EFFECT OF POLY-SI GETTERING SCHEME ON THE QUALITY OF SI EPITAXIAL FILM
EFFECT OF POLY-SI GETTERING SCHEME ON THE QUALITY OF SI EPITAXIAL FILM
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Date
1981
Authors
CHEN, MC
LEE, JY
WU, HJ
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https://ir.lib.nycu.edu.tw/handle/11536/5032
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