Effect of Annealing Treatment on Performance of Ga2O3 Conductive-Bridging Random-Access Memory

Abstract

The effect of annealing on the performance of conductive-bridging random-access memory (CBRAM) with an amorphous gallium oxide (a-Ga2O3) switching layer has been studied. After annealing at 200 degrees C in N-2, a significant improvement of the bipolar resistive switching characteristics was observed. The a-Ga2O3 CBRAM showed good memory performance, with high switching endurance (up to 7.5 x 10(2) cycles) and high thermal stability. The resistive switching stability and electrical uniformity were also obviously improved. The memory window remained above 10(5) over 7.5 x 10(2) endurance cycles at 85 degrees C. Material characterization by x-ray photoelectron spectroscopy suggested that the improved uniformity of the resistive switching in the N-2-annealed Ga2O3 films may result from a higher density of oxygen vacancies. These results indicate great potential for such devices in future high-density nonvolatile memory applications.