微機電系統校際整合研究---子計畫二：微小機電材料與製程技術發展與研究

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1996

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微機電系統, 微感測器, 微致動器, 微元件, MEMS, Micromaching, Microsensor, Microactuator, Microdevice

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https://www.grb.gov.tw/search/planDetail?id=234537&docId=43046
 https://ir.lib.nycu.edu.tw/handle/11536/96074

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研究計畫;;Research Plans

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