鏡面可調式內視鏡的研究---子計畫II：內視鏡用熱動式多自由度微致動器的設計與製作

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882218E009008.pdf (361.26 KB)

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1999

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微致動器, 熱驅動, 主動式內視鏡, 多晶矽, 微細加工, 有限元素分析, Microactuator, Thermal driven, Active endoscope, Polysilicon, Micromachining, Finite element analysis (FEA)

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https://www.grb.gov.tw/search/planDetail?id=431311&docId=77319
 https://ir.lib.nycu.edu.tw/handle/11536/94488

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研究計畫;;Research Plans

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