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學術出版;;Publications
期刊論文;;Articles
COBALT SILICIDE INTERCONNECTION FROM A SI/W/CO TRILAYER STRUCTURE
COBALT SILICIDE INTERCONNECTION FROM A SI/W/CO TRILAYER STRUCTURE
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A1989R901500046.pdf
(745.48 KB)
Date
1989-01-01
Authors
LIN, MZ
WU, CY
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https://ir.lib.nycu.edu.tw/handle/11536/4459
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