<link rel="stylesheet" href="styles.cf390c6bfbe7555f.css">

THE EFFECT OF FILM THICKNESS ON THE ELECTRICAL-PROPERTIES OF LPCVD POLYSILICON FILMS

Thumbnail Image

Files

A1984SL25600042.pdf (1.23 MB)

Date

1984

Authors







Journal Title

Journal ISSN

Volume Title

Publisher

DOI

Abstract

Description

Keywords

Citation

URI

https://ir.lib.nycu.edu.tw/handle/11536/4870

Collections

期刊論文;;Articles

Endorsement

Review

Supplemented By

Referenced By