嵌附減光式相移光罩吸光相移層研製

Date

Authors

Keywords

相移光罩, 嵌入, 減光, 微影技術, Phase shifting mask, Embedding, Attenuated, Microlithography

URI

https://www.grb.gov.tw/search/planDetail?id=283436&docId=51274
https://ir.lib.nycu.edu.tw/handle/11536/95360

Collections

研究計畫;;Research Plans