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學術出版;;Publications
研究計畫;;Research Plans
超大型積體電路多層配導線間含氟絕緣膜之開發研究
超大型積體電路多層配導線間含氟絕緣膜之開發研究
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Date
1996
Authors
葉清發
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https://www.grb.gov.tw/search/planDetail?id=218528&docId=38690
https://ir.lib.nycu.edu.tw/handle/11536/96017
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