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直流磁控電漿濺鍍腔體中多重尺度及物理現象之模擬及實驗研究(II)
直流磁控電漿濺鍍腔體中多重尺度及物理現象之模擬及實驗研究(II)
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Date
2005
Authors
吳宗信
WU JONG-SHINN
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https://www.grb.gov.tw/search/planDetail?id=1129110&docId=215076
https://ir.lib.nycu.edu.tw/handle/11536/90490
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