電子束微影之鄰近效應修正

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Date

1999

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電子束, 微影術, 鄰近效應修正, 充電效應, 輸出量, E-beam, Lithography, Proximity effect correction, Changing effect, Throughput

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https://www.grb.gov.tw/search/planDetail?id=418244&docId=74199
 https://ir.lib.nycu.edu.tw/handle/11536/94250

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研究計畫;;Research Plans

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