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12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫一：12吋矽晶圓CVD製程設備的加熱及成長BST薄膜之進氣系統設計與反應爐系統整合(II)

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2000

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https://www.grb.gov.tw/search/planDetail?id=549681&docId=101493
 https://ir.lib.nycu.edu.tw/handle/11536/102880

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研究計畫;;Research Plans

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