Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride

Abstract

New single-source precursor to tantalum nitride thin films, ((BuN)-N-t)Ta(NEt2)(3), and related complexes, (RN)Ta(NEt2)(3) (R = Pr-i and Pr-n), were prepared by reacting corresponding (RN)TaCl(3)py(2) complexes (R = Bu-t, Pr-i and Pr-n) with LiNEt2 in hydrocarbon solvents. The structure of ((BuN)-N-t)TaCl(3)py(2) was determined by X-ray crystallography. (C) 1998 Elsevier-Science Ltd. All rights reserved.