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低介電常數材料與銅製程整合之研究(I)
低介電常數材料與銅製程整合之研究(I)
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Date
2000
Authors
施敏
SZE SIMON MIN
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https://www.grb.gov.tw/search/planDetail?id=583867&docId=109701
https://ir.lib.nycu.edu.tw/handle/11536/98517
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