12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---總計畫 (I)

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2000

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https://www.grb.gov.tw/search/planDetail?id=549676&docId=101492
 https://ir.lib.nycu.edu.tw/handle/11536/102869

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研究計畫;;Research Plans

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