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CF4 PLASMA-ETCHING ON LINBO3

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Date

1979

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Journal Title

Journal ISSN

Volume Title

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DOI

10.1063/1.90959

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URI

http://dx.doi.org/10.1063/1.90959
 https://ir.lib.nycu.edu.tw/handle/11536/5088

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期刊論文;;Articles

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