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BARRIER EFFECT OF E-BEAM EVAPORATED TUNGSTEN INTERLAYER IN AL/W/PTSI METALLIZATION LAYER

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Date

1988-09-01

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DOI

10.1007/BF02652125

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http://dx.doi.org/10.1007/BF02652125
 https://ir.lib.nycu.edu.tw/handle/11536/4490

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期刊論文;;Articles

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