LOW-COST TEMPERATURE-COMPENSATED THERMORESISTIVE MICRO CALORIMETRIC FLOW SENSOR BY USING 0.35 mu m CMOS MEMS TECHNOLOGY

Abstract

In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow ((TMCF)-M-2) sensor by using a commercial 0.35 mu m 2P4M CMOS MEMS technology is reported. For nitrogen flow, the fabricated (TMCF)-M-2 sensor achieves a normalized sensitivity of 230 mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude better than the reported micro calorimetric flow sensors. The experimental results of (TMCF)-M-2 sensor under different ambient temperatures T-a of 22 degrees C similar to 48 degrees C showed the excellent temperature insensitive output with the maximum normalized variation of 0.5%. Compared to the uncompensated counterpart (49%), it demonstrates our robust (TMCF)-M-2 sensor design is applicable for the integration of on-chip CMOS electronics for the Internet of Things.