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HIGH-TEMPERATURE STABILITY OF PLATINUM SILICIDE ASSOCIATED WITH FLUORINE IMPLANTATION

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Date

1990-04-01

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DOI

10.1063/1.345327

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http://dx.doi.org/10.1063/1.345327
 https://ir.lib.nycu.edu.tw/handle/11536/4143

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期刊論文;;Articles

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