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0.25-0.35微米圖案轉移用石英蝕刻調細式相移光罩之最佳化模擬及其研製
0.25-0.35微米圖案轉移用石英蝕刻調細式相移光罩之最佳化模擬及其研製
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Date
1995
Authors
龍文安
Loong Wen-an
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https://www.grb.gov.tw/search/planDetail?id=172228&docId=29261
https://ir.lib.nycu.edu.tw/handle/11536/96348
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