Passivation of defects in a-Si : H TFTs with 150 degrees C supercritical fluids

Abstract

In this study, the supercritical fluids act the transporter and deliver H2O molecule into the a-Si:H film for repairing defects. From experiment results, superior transfer characteristic is obtained after the treatment of supercritical fluids mixed with water and propyl-alcohol. Besides, density of states is also reduced significantly during this processing.