熱動式撓性微型機構的設計與製作(II)

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872218E009015.pdf (222.38 KB)

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Keywords

微機電系統, 微致動器, 表面細微加工, 體微加工, 微型夾子, Micro electromechanical system, Microactuator, Surface micromachining, Bulk micromachining, Microgripper, MEMS

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https://www.grb.gov.tw/search/planDetail?id=395592&docId=69862
https://ir.lib.nycu.edu.tw/handle/11536/94862

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