垂直圓柱容器中向下強制氣流流過一水平加熱晶圓之渦旋流結構與相關熱傳特性研究(I)

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2001

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渦流, 晶圓, 熱傳遞, 垂直圓柱容器, 向下強制氣流, Vortex flow, Wafer, Heat transfer, Clindrical chamber, Downward gas flow

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https://www.grb.gov.tw/search/planDetail?id=645518&docId=121282
 https://ir.lib.nycu.edu.tw/handle/11536/93566

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研究計畫;;Research Plans

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