12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---總計畫(Ⅱ) - 林清發; LIN TSING-FA (My University, 2001)
Research and Development of CVD Process Equipment for a 12-inch Single Silicon Wafer and Growth of BST Dielectric Thin Film (II)
Keywords: 矽晶圓; 介電薄膜; 半導體工業; 化學氣相沉積製程設備; Silicon wafer; Dielectric thin film; Semiconductor industry; Chemical vapor deposition process equipment