Title: | 真空低壓系統自適應與強健控制器開發研究 The Development of Adaptive Smith Predictor and Robust Controller for a Downstream Vacuum System |
Authors: | 李安謙 LEE AN-CHEN 國立交通大學機械工程學系(所) |
Issue Date: | 2014 |
Gov't Doc #: | MOST103-2221-E009-124-MY2 |
URI: | http://hdl.handle.net/11536/101176 https://www.grb.gov.tw/search/planDetail?id=8349201&docId=444716 |
Appears in Collections: | Research Plans |