| Title: | 超高真空化學氣相沈積新穎複晶矽薄膜電晶體之低溫閘極介電層與新結構之研究---子計畫IV：超高真空化學氣相沉積低溫複晶矽薄膜電晶體之鈍化與可靠度之研究 |
| Authors: | 詹世雄 交通大學材料科學與工程研究所 |
| Keywords: | 超高真空化學氣相沈積法;複晶矽;薄膜電晶體;UHVCVD;Polysilicon;Thin film transistor |
| Issue Date: | 2000 |
| Gov't Doc #: | NSC89-2215-E009-005 |
| URI: | http://hdl.handle.net/11536/101204 https://www.grb.gov.tw/search/planDetail?id=542190&docId=99607 |
| Appears in Collections: | Research Plans |
