離子植入機防震裝置之研發

Title:	離子植入機防震裝置之研發 Development of Earthquake Protective System for Ion Implanters
Authors:	王彥博 WANG YEN-PO 國立交通大學土木工程學系(所)
Issue Date:	2008
Gov't Doc #:	NSC97-2622-E009-006-CC2
URI:	http://hdl.handle.net/11536/102676 https://www.grb.gov.tw/search/planDetail?id=1721730&docId=295743
Appears in Collections:	Research Plans