微波電漿化學氣相沉積光學鑽石晶片製造技術

Title:	微波電漿化學氣相沉積光學鑽石晶片製造技術 Technology for Fabrication of Optical Diamond Wafers by Microwave Plasma Chemical Vapor Deposition
Authors:	張立 CHANG LI 國立交通大學材料科學與工程學系(所)
Issue Date:	2007
Gov't Doc #:	NSC96-2622-E009-002-CC3
URI:	http://hdl.handle.net/11536/102900 https://www.grb.gov.tw/search/planDetail?id=1397635&docId=249735
Appears in Collections:	Research Plans