Title: | Method for fabricating nanoscale thermoelectric device |
Authors: | Chao Chuen-Guang Chen Jung-Hsuan Yang Ta-Wei |
Issue Date: | 14-Jun-2011 |
Abstract: | The present invention discloses a method for fabricating a nanoscale thermoelectric device, which comprises steps: providing at least one template having a group of nanoscale pores; forming a substrate on the bottom of the template; injecting a molten semiconductor material into the nanoscale pores to form a group of semiconductor nanoscale wires; removing the substrate to obtain a semiconductor nanoscale wire array; and using metallic conductors to cascade at least two semiconductor nanoscale wire arrays to form a thermoelectric device having a higher thermoelectric conversion efficiency. |
Gov't Doc #: | H01L021/76 H01L021/44 H01L021/22 H01L021/38 H01L021/20 H01L021/36 |
URI: | http://hdl.handle.net/11536/104661 |
Patent Country: | USA |
Patent Number: | 07960258 |
Appears in Collections: | Patents |
Files in This Item:
If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.