Low threshold voltage CMOSFETs with NiSi fully silicided gate and Modified Schottky barrier source/drain junction

Title:	Low threshold voltage CMOSFETs with NiSi fully silicided gate and Modified Schottky barrier source/drain junction
Authors:	Lin, Chia-Pin Tsui, Bing-Yue Hsieh, Chih-Ming Huang, Chih-Feng 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Issue Date:	2007
Abstract:	Low threshold voltage CMOSFETs with NiSi fully silicided gate and Modified Schottky barrier source/drain junction were fabricated. Symmetric threshold voltage was obtained by implant-to-silicide technique. Lateral growth rate and thermal stability of NiSi on SiO2 were investigated. Single silicide and low temperature process make the proposed process very promising in sub-45nm technology nodes.
URI:	http://hdl.handle.net/11536/12357
ISBN:	978-1-4244-0584-8
Journal:	2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA), Proceedings of Technical Papers
Begin Page:	172
End Page:	173
Appears in Collections:	Conferences Paper