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Title: 藉由氧化鈦造成吸附聚集效應影響氧化銦鎵鋅與氧化銦鋅薄膜電晶體特性
Gettering Effect Induced by Oxygen-Deficient Titanium Oxide in InZnO and InGaZnO Channel Systems
Authors: 董建宏
Tung, Chien-Hung
張俊彥
林建中
Chang, Chun-Yen
Lin, Chien-Chung
光電系統研究所
Keywords: 氧化銦鎵鋅;氧化銦鋅;薄膜電晶體;InGaZnO;InZnO
Issue Date: 2015
URI: http://140.113.39.130/cdrfb3/record/nctu/#GT070258015
http://hdl.handle.net/11536/127297
Appears in Collections:Thesis


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