含電子蒙地卡羅法的平行計算流體模型於多尺度射頻電漿模擬研究

Title:	含電子蒙地卡羅法的平行計算流體模型於多尺度射頻電漿模擬研究 Parallel Computing of Fluid Modeling with Electron Monte-Carlo Collision for a Multi-Scale Rf Plasma Simulation
Authors:	國立交通大學機械工程學系（所）
Issue Date:	2016
Gov't Doc #:	MOST103-2923-E009-004-MY3
URI:	http://hdl.handle.net/11536/130617 https://www.grb.gov.tw/search/planDetail?id=8255622&docId=437006
Appears in Collections:	Research Plans