預測干擾觀測器應用於半導體製程的隨機干擾之開發研究

Title:	預測干擾觀測器應用於半導體製程的隨機干擾之開發研究 Predictive Disturbance Observer Structure Applied to Semiconductor Manufacturing Process under Different Kinds of Stochastic Disturbances
Authors:	國立交通大學機械工程學系（所）
Issue Date:	2016
Gov't Doc #:	MOST104-2221-E009-027-MY2
URI:	http://hdl.handle.net/11536/130707 https://www.grb.gov.tw/search/planDetail?id=11568455&docId=467851
Appears in Collections:	Research Plans