Comprehensive Study on Reflectance of Si3N4 Subwavelength Structures for Silicon Solar Cell Applications Using 3D Finite Element Analysis

Title:	Comprehensive Study on Reflectance of Si3N4 Subwavelength Structures for Silicon Solar Cell Applications Using 3D Finite Element Analysis
Authors:	Lu, Zheng-Liang Li, Yiming 電機學院電子工程學系及電子研究所 College of Electrical and Computer Engineering Department of Electronics Engineering and Institute of Electronics
Keywords:	Element Analysis;Silicon Nitride;Sub Wavelength Structure;Shape Effect;Morphological Effect;Antireflection Coating;Reflectance;Solar Cell;Rigorous Coupled-Wave Approach
Issue Date:	2011
Abstract:	In this work, a full 3D finite element analysis for the silicon nitride (Si3N4) subwavelength structure (SWS) deposited on the antireflection coating (ARC) of a-Si thin film solar cell is conducted. We investigate the reflectance property of cylinder-, right circular cone-, and square pyramid shape of Si3N4 SWS with various heights and incident angles. The results show that the pyramid shape of SWS possesses the best reflectance property in the optical region from 400 am to 1000 rim. Comparison with the RCWA work is also reported.
URI:	http://hdl.handle.net/11536/135543
ISBN:	978-1-4398-7139-3
Journal:	NANOTECHNOLOGY 2011: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL, NSTI-NANOTECH 2011, VOL 2
Begin Page:	21
End Page:	24
Appears in Collections:	Conferences Paper