| Title: | Simulations of Electric Field Distributions by the Susceptor-Coupling Effects for 2.45GHz Microwave inside Microwave Chamber |
| Authors: | Hsueh, Fu-Kuo Chang, Chih-Chen Huang, Kun-Ping Lee, Yao-Jen Wu, Wen-Fa Chao, Tien-Sheng 電子物理學系 Department of Electrophysics |
| Issue Date: | 2015 |
| URI: | http://hdl.handle.net/11536/136112 |
| ISBN: | 978-1-4799-9928-6 |
| ISSN: | 1946-1550 |
| Journal: | PROCEEDINGS OF THE 22ND INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA 2015) |
| Begin Page: | 420 |
| End Page: | 423 |
| Appears in Collections: | Conferences Paper |
- Susceptor Coupling for the Uniformity and Dopant Activation Efficiency in Implanted Si Under Fixed-Frequency Microwave Anneal / Lee, Yao-Jen;Hsueh, Fu-Kuo;Current, Michael I.;Wu, Ching-Yi;Chao, Tien-Sheng
- Low-Temperature Microwave Annealing Processes for Future IC Fabrication-A Review / Lee, Yao-Jen;Cho, Ta-Chun;Chuang, Shang-Shiun;Hsueh, Fu-Kuo;Lu, Yu-Lun
- Dopant Activation in Single-Crystalline Germanium by Low-Temperature Microwave Annealing / Lee, Yao-Jen;Chuang, Shang-Shiun;Hsueh, Fu-Kuo;Lin, Ho-Ming;Wu, Shich-Chuang
- Amorphous-Layer Regrowth and Activation of P and As Implanted Si by Low-Temperature Microwave Annealing / Hsueh, Fu-Kuo;Lee, Yao-Jen;Lin, Kun-Lin;Current, Michael I.;Wu, Ching-Yi
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