Title: 利用碲為源層及增強阻障特性於氮化矽金屬導電橋接電阻式記憶體之可靠度優化研究
Optimization of Reliability in SiN-based Conductive Bridge Random Access Memory by Using Tellurium as Source Layer and Enhancing Barrier Property
Authors: 戴光駿
曾俊元
Dai, Guang-Jyun
Tseng, Tseung-Yuen
電子工程學系 電子研究所
Keywords: 碲;氮化矽;金屬導電橋接電組式記憶體;阻障層;Tellurium;Silicon nitride;CBRAM;Barrier
Issue Date: 2016
URI: http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070350159
http://hdl.handle.net/11536/138881
Appears in Collections:Thesis